Thanks to its extremely low coefficient of thermal expansion (CTE), ZERODUR® is commonly used as a key component, for instance as a stage, frame or mirror in steppers.
Select optical glass types such as i-Line glasses that offer high UV transmittance as well as high refractive index homogeneity are well suited for use in illumination and projection systems in i-Line steppers.
Our i-line filters offer extraordinary radiation resistance and outstanding transmission at 365 nm in combination with a narrow spectral bandwidth.
SCHOTT is the world’s leading supplier of thin glass, ultra-thin glass and wafers & substrates made of different materials. These come in various sizes of between 4” and 12”. Their surface qualities and customized features vary; therefore, these products are ideally suited for lithography applications as well as wafer-level-packaging.