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SCHOTT North America
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Fused Silica LITHOSIL®
Product Information
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High quality synthetic fused silica LITHOSIL® with excellent optical properties is particularly suitable for the highly demanding applications found in the optical industry. The different quality levels (offered in different grades: Q0, Q1, Q2, QT) can be adapted to all kinds of individual customers' needs, from NIR (IR) to DUV.
Synthetic fused silica LITHOSIL® from SCHOTT North America has the following outstanding properties:
- Free of inclusions and bubbles (eg. grades Q0 + Q1)
- Excellent UV transmittance from 185 nm to 2.5 µm
- High laser durability
- High refractive index homogeneity: additional 3D option
- High temperature stability
- Low stress birefringence
- Very low thermal expansion coefficient
- Very low fluorescence
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Benefits
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The amorphous synthetic fused silica LITHOSIL® of high purity completes the application range of optical materials from DUV to IR with a very good transmission ranging from 185 nm to 2.5 µm.
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Key Applications
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Fused silica is widely used in applications such as:
- Micro-/Lithographic applications: stepper lenses, photo mask blanks
- DUV laser components
- Standard optics
- Excimer laser optics
- Litho optics
- Beam deliveries
- Light pipes
- Laser fusion
- Technical usage
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Forms of Supply
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SCHOTT North America offers LITHOSIL® components and blanks in different grades along with different surface qualities (raw, cut, ground or polished), depending on the individual requirements of the customers.
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Specifications
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Grades:
Different material grades are characterized in the functional direction by:
- Very low inclusion / bubble levels
- Low levels of refractive index variations and local in-homogeneities especially striae
Excimer Grades:
Excimer laser optics require fused silica of the following exceptional qualities:
- High internal transmission, wide spectral UV-range
- Very low fluorescence (qualified by laser induced fluorescence at 193 nm).
Excimer grades are available in LITHOSIL® Q0 and Q1 grade
3D Material
- Refractive index homogeneity qualified in all 3 dimensions depending on geometry
- Available in LITHOSIL® Q0 grade
- 3D Material is available on request
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Quality Assurance
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SCHOTT North America offers fused silica with 100% control of homogeneity, stress birefringence, striae, bubbles, and inclusions. We utilize statistical control of refractive index, transmittance, laser induced fluorescence, trace-elements and OH-content.
Quality levels:
- Q0: is characterized by its high three-dimensional optical homogeneity. Free of striations in any functional direction, it is recommended for high-end resolution requirements in optical elements such as prisms and lenses.
- Q1: exhibits high homogeneity and has no striations in the functional direction. Typical applications are optical elements such as lenses, windows and wafers.
- Q2: is not specified concerning homogeneity. This grade is recommended for optics in the visible spectral range or optics in the UV with less stringent demands on transmission.
- QT: is not specified concerning homogeneity, striae and striations. This grade is recommended for technical applications.
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Contact
SCHOTT North America, Inc.
Corporate Office
555 Taxter Road Elmsford, NY 10523 USA
 | +1 (914)831-2200 |
 | +1 (914)831-2201 |
E-mail
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