ULTRA-THIN BOROSILICATE GLASS
SCHOTT MEMpax® is a borosilicate glass that is manufactured with a fire-polished surface. It has similar chemical and physical characteristics to the well-known product SCHOTT Borofloat® 33.
At the same time, MEMpax® is available in much lower thicknesses and offers a thin wafer that no longer needs to be ground and polished thanks to its excellent surface quality. SCHOTT MEMpax® can be put to use anywhere that extremely thin borosilicate glasses are required.
The coefficient of linear thermal expansion of MEMpax® corresponds with that of silicon, and this glass is perfectly suited for use in anodic bonding. Its low auto fluorescence, combined with its excellent surface quality, flatness and homogeneity, opens up numerous application possibilities for MEMpax® in MEMS (MicroElectroMechanical Systems) and Biotechnology.
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