SCHOTT North America

Sensors / Metrology and Control Engineering

Wafer Positioning

Light guide for wafer positioning

In semiconductor manufacturing, lithography is used to transfer the pattern of circuitry from a photomask - a quartz plate containing the master copy of a microscopic IC - to a wafer, a thin slice of silicon or other semiconductor material on which the Ics are made. To be able to manufacture such Ics lithography strongly depends on the ability to precisely position the wafer.

Light guides are used to position the wafers. These light guides are very complex, in particular as the individual fibers have to be positioned with a precision of 10 µm.

Several light guides are used to illuminate specific spots, other light guides to transport the diffracted light to an electronic unit where the signals are analyzed to position the wafer correctly.

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Contact

Lighting and Imaging
SCHOTT North America Inc.

122 Charlton Street
Southbridge, MA 01550
USA

+1 (508)765-9744

+1 (508)764-6273

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