SCHOTT North America

Product Information

LITHOTEC® i-line glass is a type of optical glass which offers both high UV-transmittance at 365 nm and high refractive index homogeneity. Benefits LITHOTEC® i-line glass offered by SCHOTT North America has the following outstanding properties: High refractive index homogeneity values (<0.5 ppm at 200 mm diameter) Excellent internal quality Negligible stress birefringence due to a well-defined annealing process Variation of absolute refractive index values per lot of less than 5 x 10-5 Availability of a wide range of high transmission glass types FK5HT to F14 HT ensures high flexibility in optical designs

Key Applications

LITHOTEC® i-line glasses are most often used in applications such as: Projection lenses and illumination systems for use in i-line wafer steppers and scanners Standard optical applications requiring high transmission in the UV region

Forms of Supply

SCHOTT North America offers customized forms in accordance to the geometries requested by the customer for discs and plates. If you are interested in high precision optical components made of LITHOTEC® i-Line glass, please check here about our options or contact us.

Specifications

SCHOTT North America offers i-line glasses with: Diameter up to 300 mm Thickness up to 100 mm Homogeneity, bubbles/inclusions, dispersion values according to the SCHOTT Optical Glasses catalog

Quality Assurance

SCHOTT North America offers i-line glasses with 100% control of homogeneity, stress birefringence, striae, bubbles, and inclusions. We utilize statistical control of refractive index and transmittance.

For further information please contact our sales team:

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