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Product Information

LITHOTEC® calcium fluoride crystals grown from purest (synthetic) raw material are required for illumination and projection optics in 248 nm, 193 nm and 193 nm immersion micro / lithography technologies and laser applications. Benefits LITHOTEC® calcium fluoride crystals complete the application range of optical materials from VUV to IR with very good transmission ranging from 130 nm to 9 µm due to its High projection optic quality High production volume High purity High laser durability High refractive index homogeneity Excellent UV transmittance Low stress birefringence

Key Applications

The very high laser damage threshold of LITHOTEC® calcium fluoride crystals makes it the first choice material for: Excimer laser optics Beam delivery Illumination systems operating at 45nm node Optical systems in lithography, astronomy, photography, HDTV zoom lenses, microscopy Sensors (especially IR-spectrum) Spectrometers Medical lasers

Forms of Supply

SCHOTT North America offers calcium fluoride components and blanks with different crystal orientations (<111>, <100>, random or others on request) along with different surface qualities (raw, cut, ground or polished), depending on the individual requirements.

Specifications

SCHOTT North America's expertise allows fabrication of CaF2 blanks in diameters up to 350 mm and with thicknesses exceeding 100 mm and highest transmission from 130 nm to 9 ìm (depending on sample thickness).

Quality Assurance

There is 100% control of internal quality, including examinations of stress birefringence, striae, bubbles and inclusions, scattering, laser durability and transmittance.

Any Related Information

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