Photo-Sensitive glass wafer
FOTURAN® II is an improved photo-sensitive glass based on the well-known FOTURAN®. It is produced in a continuous melting process with optimal homogeneity.
FOTURAN® II is a technical glass that crystallizes after UV exposure and temperature processes. The crystallized areas can be etched away with a high aspect ratio, resulting in extremely fine structures and vias. After a second exposure and tempering process, FOTURAN® II can be transformed into a glass ceramic. Anodic bonding is possible as well.
If needed, structured FOTURAN® II substrates can be applied in the semiconductor chip and semiconductor packaging processes. The process flow works without photo-resist and can be used with standard semiconductor equipment.