SCHOTT FLEXINITY® | SCHOTT North America

With SCHOTT FLEXINITY^®, SCHOTT is introducing a brand new, innovative product portfolio, which offers highly accurate and versatile structured glass substrates.

Most of our glass substrates in various thicknesses are available as FLEXINITY^® processed:

D 263^® bio Substrate Glass
D 263^® T eco Thin Glass
MEMpax^®
AF 32^® eco
BOROFLOAT^® 33

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Position tolerance < 20 μm (equiv. ± 10 μm)
Feature size tolerance < 20 μm (equiv. ± 10 μm)
Structure radius ≥ 100 μm
Down to 100 µm thickness

Within the triangle of structuring tradeoffs, FLEXINITY^® excels in all categories.

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Accuracy & Precision with SCHOTT FLEXINITY TM

Achieving tight tolerances is crucial for high-tech applications and high quality products alike

Inaccuracy leads to misalignment.
Breakage and chipping at structure edges lead to low yields and inefficient processes.
Our product has almost no chipping.
Structured Wafers by SCHOTT achieve tight specs.
- < 20 μm (equiv. ± 10 μm) in position tolerance
- < 20 μm (equiv. ± 10 μm) in structure size tolerance

Customized solutions with SCHOTT FLEXINITY TM

SCHOTT offers customized solutions for through-holes in glass substrates.

Any design matching the structuring criteria mentioned below is possible.

Key Design Features

Minimum structuring radius	100 µm
Minimum distance between structures	300 µm
Minimum distance to Wafer edge	≥ 3 mm

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SCHOTT FLEXINITY™ for sensoring applications

Pressure Sensors

High quality and durable pressure sensors require materials with very specific properties. Glass and silicon share one important property: their coefficient of thermal expansion. When joined through anodic bonding, glass and silicon react to temperature changes in the same way, minimizing stresses throughout the bonding interface. Additionally, the surface roughness has to be extremely low, since adhesion strongly depends on surface quality.

As devices, modules and sensors tend to become thinner and lighter, glass substrates need to be as thin as possible to fit seamlessly.

SCHOTT’s structured wafers feature fire-polished surface quality to permit strong bonding, and are available in wafers thinner than a human hair, perfect for use as ultra-small sensors.

SCHOTT FLEXINITY™ for microfluidic applications

Microfluidics

D 263^{^®} bio is easy to structure and can be toughened chemically, making it an ideal choice for applications that need uncompromising optical quality and very high chemical resistance. It can be used as a substrate glass for optical diagnostics, microfluidic components or other consumer and industrial applications.

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Please see below the specifications of our preliminarily set up sampling line. Keep in mind that the specs of the fully implemented process are further improved:

Specifications	Value
Thicknesses (depending on glass type)	0.1 mm – 3.3 mm
Wafer size	max. 600 mm in diameter (round and rectangular)
Structuring features:
- Minimum structuring radius	≥ 100 μm
- Structure size tolerance	< 20 μm (equiv. ± 10 μm)
Edge exclusion	≥ 3 mm
Minimum distance between structures	> 300 µm
Position tolerance of structures	< 20 μm (equiv. ± 10 μm)
Layout	Through structures according to customer specifications

Please note that special solutions are possible upon request.

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SCHOTT’s innovative structuring portfolio for Wafer & Thin Glass

SCHOTT FLEXINITY^® - Structured Glass Solutions

SCHOTT’s innovative structuring portfolio for Wafer & Thin Glass

Product Information

Advantages

Capabilities

Applications

Pressure Sensors

Microfluidics

Technical Details

Downloads

SCHOTT’s innovative structuring portfolio for Wafer & Thin Glass

SCHOTT FLEXINITY® - Structured Glass Solutions

SCHOTT’s innovative structuring portfolio for Wafer & Thin Glass

Product Information

Advantages

Capabilities

Applications

Pressure Sensors

Microfluidics

Technical Details

Downloads

SCHOTT FLEXINITY^® - Structured Glass Solutions